Vol. 7, No. 2

Special Issue on Micro System Technology


    A Novel Method for Evaluating the Thickness of Silicon Membrane Using a Micromachined Acoustic Wave Sensor [PDF]
    Chi-Yuan Lee, Ying-Chou Cheng, Tsung-Tsong Wu, Yung-Yu Chen, Wen-Jong Chen, Shih-Yung Pao, Pei-Zen Chang, Ping-Hei Chen, Kai-Hsiang Yen and Fu-Yuan Xiao          pp. 61-66

 

    A Novel Thin Film Bulk Acoustic Resonator (FBAR) Duplexer for Wireless Applications [PDF]
    C. H. Tai , T. K. Shing, Y. D. Lee and C. C. Tien          pp. 67-71

 

    Fabrication of Free-space MOEM Component by CMOS Process [PDF]

     Ying-Chou Cheng, Chi-Yuan Lee, Ching-Liang Dai, Wen-Jong Chen, Pei-Zen Chang and Ping-Hei Chen          pp. 73-76

 

    The Characterization and Fabrication of Pyroelectric Infrared Sensor and Application of Thermal Image Arra [PDF]
    C. C. Chang, C. H. Lee and K. P. Chu          pp. 77-80

 

    Real-time Observation for the Formation of Microlens Arrays Fabricated Using Thermal Reflow Process [PDF]

    Mao-Kuo Wei, I-Ling Su, Ming-Chang Jung and Kai-Wen Huang          pp. 81-86

 

    Separate and Manipulate Different Kinds of Particles by Dielectrophoresis [PDF]

    Jung-Tang Huang, Shao-Yo Hou, Chia-Ching Lin, Wei-Sheng Chang and Yu-Jen Lai          pp. 87-90

 

    A Micro Force Sensor Using Force-balancing Feedback Control System and Optic-fiber Interferometers [PDF]

    Kuai-Kai Chang, Nang-Chian Shie, Hung-Ming Tai and Tsan-Lin Chen          pp. 91-94

 

    A Novel Polymer Microneedle Arrays and PDMS Micromolding Technique [PDF]

    Shyh-Chyi Kuo and Yukon Chou          pp. 95-98

 

    A Novel Measurement Device for SAW Chemical Sensors with FT-IR Spectro-microscopic Analytical Capability [PDF]

    Shi-Hung Hoang, Gor-Don Horng, Chen-Yu Chiang, Cheng-Hao Ko, Yi-Chung Lo, Ching-Iue Chen and Chao-Kang Chang          pp. 99-102

 

    The Forward-backward Buckling Motion of a Micro Strip through Thermal Loading [PDF]

    Chao-Kuang Chen and Chih-Min Yao          pp. 103-106

 

    Universal Platform for Developing an Integrated Biochip or Micro-TAS Based on Electrokinetics [PDF]

    Jung-Tang Huang, Shao-Yo Hou, Chia-Ching Lin, Yu-Jen Lai and Wei-Sheng Chang          pp. 107-110

 

    16×2 Thermally Actuating and Sensing Probe Array [PDF]

    Ching Hsiang Tsai, Chao Chiun Liang, Gen Wen Hsieh, Wei-Chih Lin and Yuh Wen Lee          pp. 111-114

 

    An 1´2 SOI Based Optical Splitter with Adding Triangular Air Hole in PBG Cell [PDF]

    Lan-Chih Yang, Chun-Wei Tsai, Kuo-Chang Lo and Shyh-Lin Tsao          pp. 115-118

 

    Experimental Study of Microlens Fabrication Using Polyvinyl Alcohol Solution [PDF]

    Chin-Tai Chen and Han-Wei Su          pp. 119-122

 

    Characterization of Silicon-based Ultrasonic Nozzles [PDF]

    Y. L. Song, S. C. Tsai, Y. F. Chou, W. J. Chen, T. K. Tseng, C. S. Tsai, J. W. Chen, Y. D. Yao, C. H. Yang, M. F. Huang and Y. A. Lai          pp. 111-114